The contents of Cr,Cu, Ni, As, Cd and Pb in coal fly ash were determined by a high resolution inductively coupled plasma mass spectrometry method.The sample digestions were performed in closed microwave vessels with HN03, HClO4 and HF.The optimum conditions for the determination were obtained.The applicability of the proposed method was validated by the analysis of coal fly ash reference material (NIST SRM 1633a). The results show that most of the spectral interferences can be avoided by measuring in the high resolution mode(maximum mass resolution R=9 000).The detection limit is from 0.05 to 0.21μg/g,and the precision is fine with relative standard deviation less than 4.3%.