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采用二次阳极氧化法,以草酸为电解液,制备纳米多孔氧化铝膜。利用扫描电镜、原子力显微镜和X射线衍射仪对氧化铝薄膜的微观形貌和相组成进行了表征,研究了二次阳极氧化法制备纳米多孔氧化铝膜的过程和成膜机理。结果表明:二次阳极氧化制备的纳米多孔氧化铝膜为非定型态,所得孔洞排列规则且分布均匀,平均孔径约为29 nm,孔密度为1.74×1010个/cm2。纳米多孔氧化铝膜的形成经历了阻挡层形成、微孔层形成和多孔层形成与长大等阶段。
The secondary anodic oxidation method, oxalic acid as the electrolyte, preparation of nano-porous aluminum oxide film. The morphology and phase composition of the alumina films were characterized by scanning electron microscopy, atomic force microscopy and X-ray diffractometry. The process and film formation mechanism of the nanoporous alumina films by the secondary anodic oxidation were investigated. The results show that the nanoporous alumina membranes prepared by secondary anodic oxidation are non-stereotyped. The obtained pores are regularly and uniformly distributed, with an average pore diameter of about 29 nm and a pore density of 1.74 × 1010 cells / cm2. The formation of nano-porous aluminum oxide film has experienced barrier formation, microporous layer formation and the formation and growth of porous layer and other stages.