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采用磁控溅射技术,在N35烧结态磁体表面沉积一层低熔点PrZn合金,经750℃热扩渗3 h,再在0~500℃进行回火处理。研究了回火工艺对沉积薄膜磁体磁性能及微观组织结构的影响,并对最佳回火工艺处理后烧结磁体热稳定性进行了研究。结果表明,最佳回火温度为500℃,该工艺下,磁体矫顽力由963.96 kA/m提高到1317.14 kA/m,即在原来的基础上增加了36.64%,富Nd晶界相变得连续和光滑,降低了硬磁相之间的磁耦合,改善了晶界相及其附近在反磁化过程中反磁化畴核的形成能力,是矫顽力大幅度提高的主要原因。另外,相对未进行晶界扩散处理的磁体而言,经最佳回火工艺晶界扩散处理后的磁体,在不同温度保温后磁通不可逆损失明显降低,具有更佳的热稳定性。
Using magnetron sputtering technology, a layer of low melting point PrZn alloy was deposited on the surface of N35 sintered magnet. After prolonged at 750 ℃ for 3 h, the alloy was tempered at 0 ~ 500 ℃. The influence of tempering process on the magnetic properties and microstructure of the deposited thin film magnet was studied. The thermal stability of the sintered magnet after the optimal tempering process was studied. The results show that the optimum tempering temperature is 500 ℃. Under this process, the coercive force of the magnet increases from 963.96 kA / m to 1317.14 kA / m, that is 36.64% Continuous and smooth, reducing the magnetic coupling between the hard magnetic phase, improving the grain boundary phase and its vicinity in the anti-magnetization process of demagnetization domain nucleus formation is the main reason for the substantial increase in coercivity. In addition, compared with the magnet without grain boundary diffusion treatment, the magnet after the optimum tempering process grain boundary diffusion treatment significantly reduces the irreversible loss of flux after heat preservation at different temperatures, and has better thermal stability.