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为满足电磁型平面微电机对定子绕组线圈的高深宽比及厚度要求,提出一种利用AZ4903光刻胶制作电磁平面微电机定子绕组的方法。通过反复摸索,得到了该光刻胶的较理想的转速胶膜厚度、前烘时间温度的关系曲线及合适的曝光、显影时间。制作出了厚度为40μm、陡直度良好的定子绕组线圈。把利用该工艺制作的定子绕组和转子装配后形成了微电机,通过对该电机转速和输出力矩的测试结果表明,电机运转平稳、力矩波动小。
In order to meet the requirement of high aspect ratio and thickness of stator winding of electromagnetic planar micromotor, a method of making stator winding of electromagnetic planar micromotor by AZ4903 photoresist was proposed. Through repeated groping, get the ideal speed of the photoresist film thickness, the relationship between pre-baking time temperature curve and the appropriate exposure, development time. The stator winding coil was made with a thickness of 40 μm and a good steepness. The stator windings and rotors made by this process are assembled into a micro motor. The test results of the motor speed and output torque show that the motor runs smoothly and the torque fluctuation is small.