论文部分内容阅读
本文介绍了近年来对磁弹性型磁致伸缩多层膜的研究与开发,论述了研究过程中所探索出的一些多层膜的制备理论;探讨了包括多层膜的靶材选择、单层膜厚、层数、组织结构和真空热处理对其性能的影响。
In this paper, we introduce the research and development of magnetostrictive magnetostrictive multilayers in recent years, and discuss the preparation theory of some multilayered films explored in the course of the study. We also discuss the selection of targets including multilayers, Film thickness, number of layers, microstructure and vacuum heat treatment on its performance.