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证明了枕型二维位置敏感探测器设计的基本原理———Gear定理,并推导了适用于枕型二维位置敏感探测器的位置计算公式,此外还提出了枕型二维位置敏感探测器的制作工艺和测试结果。采用集成电路工艺所研制的枕型二维位置敏感探测器(光敏面为8 mm×8 mm)表现出良好的光电特性,当反偏为5 V时其暗电流约为15 nA,峰值时的光谱灵敏度超过了0.6 A/W。在所测量的 75%光敏区域内,均方根位置误差约为 0.135 mm,而以均方根位置误差表示的非线性度在1.1%左右,比四边形二维位置敏感探测器的位置线性度提高了近一个数量级。
This paper proves the basic principle of pin-type two-dimensional position-sensitive detector design --- Gear’s theorem and derives the position calculation formula applicable to the two-dimensional position-sensitive detector. In addition, it also presents a pillow type two-dimensional position sensitive detector The production process and test results. Pillow-type two-dimensional position-sensitive detectors (8 mm × 8 mm for the photo-sensing surface) developed using integrated circuit technology exhibit good optoelectronic properties with a dark current of about 15 nA when biased at 5 V, Spectral sensitivity exceeds 0.6 A / W. In the measured 75% light-sensitive area, the rms position error is about 0.135 mm, whereas the rms position error is about 1.1%, which is higher than that of the quadrilateral two-dimensional position-sensitive detector Nearly an order of magnitude.