非球面在光学系统中具有非常重要的作用。基于零位补偿计算全息(CGH)的干涉测量方法,因精度高、信息量大、调校方便,在光学计量和制造业领域受到广泛重视。以F数为4抛物面为测量样品,以光学计量领域比较成熟的平面、球面波象差,采用自准直方法,测出抛物面面形波象差;再用零位补偿CGH方法测量同一块样品,研究零位补偿CGH的误差传递数据。通过主要原理误差分析与计算,在光学熔融石英平面基底上制作零位补偿CGH,测量不确定度达到λ/10[峰谷值(PV),λ=0.6328μm],满足非球面波象差光学计量的要求。 Aspheres have a very important role in optical systems. The interferometry method based on zero-position compensation (CGH) is widely used in optical metrology and manufacturing because of its high precision, large amount of information and convenient adjustment. A parabolic F number of 4 is used as a measurement sample, a plane of the metrological measurement is relatively mature, a spherical wave aberration is measured, and a paraboloidal wave aberration is measured by a self-collimation method. Then, a zero compensation CGH method is used to measure the same sample , Research zero error CGH error transfer data. The main principle of error analysis and calculation, the production of zero-compensation CGH on the optical fused silica planar substrate, the measurement uncertainty of λ / 10 [PV, λ = 0.6328μm], meet the aspheric aberration optics Measurement requirements.