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利用ANSYS分析软件对矩形微悬臂梁进行模拟仿真分析,得出微悬臂梁的振型、固有频率及其在外加负载时的电压输出。在此基础上,设计、制作了微悬臂梁及能量存储电路,并在低频下对微悬臂梁的发电性能进行了测试。结果表明,当负载电阻为1 k时,此时的瞬时输出功率最大可达到0.077 4 W,可以满足低功耗产品的供电需求。
Using ANSYS software to simulate the rectangular microcantilever, the vibration mode, natural frequency and voltage output of the microcantilever are obtained. On this basis, micro-cantilever and energy storage circuit are designed and fabricated, and the micro-cantilever power generation performance is tested under low frequency. The results show that when the load resistance is 1k, the instantaneous output power at this time can reach 0.077 4W, which can meet the power demand of low power consumption products.