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为了实现工业中较大直线位移上的滚转角快速测量,设计了一种基于激光外差干涉技术的几何空间对称四光路滚转角测量系统,并针对缺少滚转参数的较大行程位移台,进行了滚转特性测量试验。试验证明,几何空间对称四光路滚转角测量系统稳定性好,抗干扰能力强,不仅有效消除了其它自由度误差的串扰,还能够高效地测出不同精度直线位移台的滚转特性,并灵敏地再现了直线位移台工作条件发生改变时工作台滚转角变化。使用常用的2π/512细分的相位计和宽度为120mm的楔面反射镜,系统角测量分辨率为0.8″,最大可测行程达到6m。若将相位计细分提高100倍,滚转角的测量分辨率将达到0.008″。当楔面反射镜宽度提高1倍,最大可测行程超过10m。
In order to realize the rapid measurement of the roll angle of the large linear displacement in industry, a geometry-space symmetrical four-beam measuring system based on laser heterodyne interferometry was designed. For the large displacement stage lacking roll parameters, Rolling characteristics measurement test. The experiment proves that the geometry-space symmetrical four-beam measuring system has good stability and strong anti-interference ability, which not only effectively eliminates the crosstalk of other degrees of freedom errors, but also can effectively measure the roll characteristics of linear displacement stages with different accuracies and is sensitive To reproduce the change of the workbench roll angle when the working conditions of the linear displacement stage are changed. Using the usual 2π / 512 subdivision phase meter and a wedge mirror of 120mm width, the system angle measurement resolution is 0.8 “and the maximum measurable stroke is 6m. If the phase meter subdivision is increased by 100 times, the roll angle Measurement resolution will reach 0.008 ”. When the wedge mirror width increased by 1 times the maximum measurable stroke of more than 10m.