The metal thin film delamination along metal/ceramic interface in the case of large scale yielding is studied by employing the strain gradient plasticity theory and the material microscale effects are considered.Two different fracture process models are used in this study to describe the nonlinear delamination phenomena for metal thin films.A set of experiments have been done on the mechanism of copper films delaminating from silica substrates,based on which the peak interface separation stress and the micro-length scale of material,as well as the dislocation-free zone size are predicted.