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高纯氢中的氢气体积比含量在99.999%以上,其生产工艺根据原料来源不同,有低温吸附法、变压吸附法、金属氢化物法、钯膜扩散法等多种方法。高纯氢是工业气体中的一个重要品种,广泛应用于化工、石化、石油、能源、电子、冶金、机械、核工业、航空航天等诸多领域。近年来,随着国内外工业气体市场的迅速增长,高纯氢的需求量也一直呈上升态势。电子工业用高纯氢配制混合掺杂气
The volume ratio of hydrogen in high-purity hydrogen is more than 99.999%. The production process varies depending on the source of raw materials, such as low-temperature adsorption, pressure swing adsorption, metal hydride, and palladium membrane diffusion. High-purity hydrogen is an important species in industrial gases and is widely used in chemical, petrochemical, petroleum, energy, electronics, metallurgy, machinery, nuclear industry, aerospace and many other fields. In recent years, with the rapid growth of industrial gas markets at home and abroad, the demand for high-purity hydrogen has also been rising. High-Purity Hydrogen for Mixed Doping in Electronic Industry