英国原子能研究所设计并制造了一种批量生产用的离子注入器。它由产生和形成离子束的大电流同位素分离器和特别设计的靶箱组成。该注入器在一小时内能掺杂30片2时或150片1时的片子,剂量为5 × 10~(15)离子/厘米~2;均匀度为±1％。离子分离器由最大能量为40,000电子伏的离子源以及形成束和聚束的磁铁组成。束通过 British Institute of Atomic Energy designed and manufactured a mass production ion implanter. It consists of a high-current isotope separator that produces and forms an ion beam and a specially designed target box. The injector is capable of doping 30 films at 2 hours or 150 films at 1 hour in one hour at a dose of 5 × 10 15 ions / cm 2; the uniformity is ± 1%. The ion trap consists of an ion source with a maximum energy of 40,000 eV and a magnet that forms the beam and bunches. Beam passed