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本研究利用定位镶嵌包埋制样技术,对团化烧结造粒后的电容器级钽粉进行了解剖。通过SEM与EDS进行了形貌观察和成分分析,并对样品进行了TEM观察,结果表明电容器级钽粉为孪晶亚稳结构,主要杂质元素为氧。
In this study, the technique of positioning inlay embedded sample preparation was used to dissect the tantalum powder of the capacitor after the pelletization sintering. Morphology and compositional analysis were carried out by SEM and EDS. TEM observation of the sample showed that the capacitor-grade tantalum powder is a twinned metastable structure and the main impurity element is oxygen.