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利用脉冲激光沉积(PLD)设备在蓝宝石衬底上制备了高质量Zn_(1-x)Mg_xO单晶薄膜,并对其结构和光学特性进行了深入细致的研究。通过能量衍射谱(EDS)确认Zn_(1-x)Mg_xO薄膜的Mg组分为45%。在Zn0.55Mg0.45O薄膜的X射线衍射谱(XRD)中观测到了明显的位于36.67°的衍射峰,对应的是(111)晶向的立方相ZnMgO。从透射光谱中可以看出,Zn0.55Mg0.45O具有陡峭的吸收边,没有发生相分离,在透射电镜图谱中也得到了证实。该ZnMgO薄膜还表现出了优异的光学特性,在Zn0.55Mg0.45O材料体系中实现了峰位位于310 nm的紫外光泵浦受激发射,其激光发射的阈值仅为22 k W/cm2。
The high quality Zn 1-x Mg x O x single crystal thin films were prepared by pulsed laser deposition (PLD) on sapphire substrates, and their structures and optical properties were studied in detail. The Mg composition of Zn1-xMg_xO films was confirmed to be 45% by energy diffraction spectroscopy (EDS). In the X-ray diffraction (XRD) of Zn0.55Mg0.45O thin film, the obvious diffraction peak at 36.67 ° was observed, which corresponded to the (111) -oriented cubic phase ZnMgO. As can be seen from the transmission spectra, Zn0.55Mg0.45O has a steep absorption edge, no phase separation, in the transmission electron microscopy has also been confirmed. The ZnMgO thin film also shows excellent optical properties. In the Zn0.55Mg0.45O material system, the excitation of the UV pump with the peak position at 310 nm is achieved, and the threshold of laser emission is only 22 k W / cm2.