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本文结合聚焦离子束-电子束(Focused ion beam-electron beam,简称FIB-EB)双束系统和真空镀膜工艺,进行微区散斑的制备工艺研究,并将所发展的微散斑制备工艺应用于喷丸镍基合金材料表面制斑,进而结合切槽法进行残余应力高温释放规律的测量研究。在FIB-EB双束系统下记录切槽前后制斑微区的图像,利用数字图像相关法计算切槽后的位移,结合InglisMuskhelishvili理论公式可计算得到残余应力。文中研究了不同温度及保温时间对残余应力释放的影响规律。结果表明,残余应力随保温时间的增长释放速度逐渐减小,最后残余应力趋于稳定值。同时,温度越高,残余应力释放越彻底,800℃下近乎完全释放。该工艺具有适用性好,效率高等优点,可望在材料微区变形测量中得到进一步应用。
In this paper, Focused ion beam-electron beam (FIB-EB) dual-beam system and vacuum coating process were used to study the preparation of micro-area speckle and the application of the developed micro-speckle preparation process The surface of the shot peening nickel-based alloy material plaque, and then combined with slotted method of residual stress and high temperature release of the measurement study. The FIB-EB dual-beam system was used to record the image of the micro-area before and after grooving. The digital image correlation method was used to calculate the displacement after grooving. The residual stress was calculated by combining InglisMuskhelishvili theory formula. In this paper, the effects of different temperature and holding time on the residual stress are studied. The results show that the residual stress decreases gradually with the increase of holding time, and finally the residual stress tends to be stable. At the same time, the higher the temperature, the more thorough the residual stress release, almost completely released at 800 ℃. The process has the advantages of good applicability, high efficiency and the like, and is expected to be further applied in the measurement of the deformation of the material micro-zone.