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本文介绍了超高真空扫描隧道显微镜（ＵＨＶ－ＳＴＭ）定位系统的设计方法，并对误差进行了分析和修正。定位系统在操作范围为－５６０～＋５６０ｎｍ时的定位精度达到了０．１ｎｍ，该系统性能稳定，运行可靠。达到了设计要求
In this paper, the design method of ultra-high vacuum scanning tunneling microscope (UHV-STM) positioning system is introduced, and the error is analyzed and corrected. Positioning system in the operating range of -560 ~ +560 nm when the positioning accuracy of 0.1nm, the system performance and reliable operation. Reached the design requirements