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一、引言 1947年晶体管的诞生开创了电子技术的新纪元。整个五十年代,在半导体材料、器件物理、工艺技术,晶体管电子学等方面进行了系统的,深入的研究。晶体管得到日益广泛的应用,引起了电子学深刻而广泛的变革。在此基础上,1958年集成电路诞生了,近三十年来,集成电路的发展日新月异,使电子技术出现了一个划时代的革命,在世界新技术革命浪潮中,以集成电路为核心的微电子技术是一项最活跃的高技术。人们认为,微电子技术的发展将对社会经济增长和社会发展产生广泛而深远的影响。
I. INTRODUCTION The birth of transistors in 1947 opened a new era in electronic technology. Throughout the 1950s, systematic and in-depth research was conducted on semiconductor materials, device physics, process technology, and transistor electronics. Transistors have become increasingly widely used, causing profound and widespread changes in electronics. On this basis, the IC was born in 1958. In the past 30 years, the rapid development of integrated circuits has brought about an epoch-making revolution in electronic technology. In the wave of new technology revolution in the world, microelectronics technology with IC as the core It is the most active high technology. It is believed that the development of microelectronics technology will have a wide and far-reaching impact on social and economic growth and social development.