利用包含透射光栅的外腔反馈结构,使半导体激光器阵列中各发光单元工作波长不相同,实现了各发光单元激射波长的啁啾。通过外腔镜使各个发光单元出射光束重叠及方向一致,实现半导体激光器阵列的光谱合束,从而提高半导体激光器的光束质量。采用前腔面镀有增透膜的激光器阵列实现功率为52.2 W的连续波激光输出,电-光转换效率达到47.9%,光谱线宽为15.17nm。整个阵列输出光束的光参量积达到3.7mm·mrad,与阵列中单个发光单元的光束质量基本一致。 The external cavity feedback structure including the transmission grating makes the operating wavelengths of the light-emitting units in the semiconductor laser array different from each other, and achieves the chirp of the lasing wavelength of each light-emitting unit. Through the external mirror so that the emission of light from each unit overlap and direction of the light beam to achieve the semiconductor laser array beam splitting, thereby enhancing the semiconductor laser beam quality. A laser array coated with an anti-reflection coating on the anterior chamber surface is used to realize continuous-wave laser output with a power of 52.2 W with an electro-optical conversion efficiency of 47.9% and a spectral linewidth of 15.17 nm. The optical parametric product of the output beam of the entire array reached 3.7 mm · mrad, substantially in agreement with the beam quality of a single light emitting unit in the array.