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介绍了线阵-面阵CCD(LMCCD)制式相机的相关原理,提出实现LMCCD相机的关键在于相机焦平面组件的研制。给出了LMCCD相机焦平面组件在研制过程中的关键技术,如LMCCD像面基板与CCD的高精度拼接,焦平面组件电子学部分的低噪声、高集成度设计,焦平面组件在真空环境下的热噪声抑制和热传导设计,以及焦平面组件的装配和焊接等。最后,给出了研制和测试结果。LMCCD拼接的共面精度优于5μm,平移量和平行度均优于2μm;在典型工作情况下,实验室测试信噪比优于90;在15min的工作周期下,焦面组件的温度控制在30℃以下。这些结果满足LMC-CD制式相机关于CCD拼接、焦面温度控制和信噪比的要求。
The principle of line array - area array CCD (LMCCD) camera is introduced. The key to realize LMCCD camera is to develop the camera focal plane module. The key technologies in the development of the focal plane module of LMCCD camera are given, such as the high-precision splicing of the LMCCD image plane substrate and the CCD, the low noise and high integration of the electronic part of the focal plane module, the focal plane module in the vacuum environment Thermal noise suppression and heat conduction design, as well as the assembly and welding of focal plane components. Finally, the development and test results are given. LMCCD splicing coplanar accuracy of better than 5μm, translation and parallelism are better than 2μm; under typical working conditions, the laboratory test signal to noise ratio is better than 90; 15min working cycle, the focal plane temperature control components in the Below 30 ℃. These results meet the requirements of LMC-CD format cameras for CCD splicing, focal plane temperature control and signal-to-noise ratio.