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  5. Study on an Atmospheric Pressure Plasma Jet and its Application in Etching Photo-Resistant Materials

Study on an Atmospheric Pressure Plasma Jet and its Application in Etching Photo-Resistant Materials

来源 :等离子体科学和技术 | 被引量 : 0次 | 上传用户：zmy_java
【摘 要】
：
An atmospheric pressure radio-frequency plasma jet that can eject cold plasma has been developed. In this paper, the configuration of this type of plasma jet is
【作 者】
：
李海江 王守国 赵玲利 叶甜春 
【机 构】
：
PhysicsDepartment,TheInstituteofMicroelectronics
【出 处】
：
等离子体科学和技术
【发表日期】
：
2004年5期
【关键词】
：
atmospheric pressure radio-frequency plasma jet characteristics 
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An atmospheric pressure radio-frequency plasma jet that can eject cold plasma has been developed. In this paper, the configuration of this type of plasma jet is illustrated and its discharge characteristics curves are studied with a current and a voltage
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