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为了实现非轴对称光学元件的高效、高精度车削,研究了基于变磁阻正应力电磁驱动原理的快速刀具伺服机构(fast tool servo,FTS)。通过解析计算和数值模拟,得出如下结论:该类型FTS的驱动力在工作范围内能保持良好的线性化特征;其最大加速度潜力可达4500m/s2;气隙宽度X0是关键结构参数,对于微行程(<100μm)电磁驱动机构,X0应在工作行程的2～5倍范围内选取。
In order to realize the high-efficiency and high-precision turning of non-axisymmetric optical components, a fast tool servo (FTS) based on the principle of variable reluctance positive-stress electromagnetic drive is studied. Through analytic calculation and numerical simulation, the following conclusions can be drawn: The driving force of this type of FTS can maintain good linearity in the working range; its maximum potential of acceleration up to 4500m / s2; air gap width X0 is the key structural parameters for Micro-stroke (<100μm) electromagnetic drive, X0 should be selected in the range of 2 to 5 times the working stroke.