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采用飞秒超快激光在GCr15轴承钢基体表面上制备了条纹、方格结构,并研究对类金刚石(DLC)薄膜结构、结合强度和耐磨性能影响。利用Raman光谱、扫描电镜、白光干涉形貌仪分析薄膜化学结构及形貌,利用划痕实验仪及SRV磨损试验机对薄膜结合强度、磨损性能进行测定。研究表明,功率密度0.96、400 mm/min、加工间距150~350μm条件下的获得的微结构对DLC薄膜sp3键含量有提升作用,并影响DLC薄膜的结合强度和耐磨性。在间距250μm条纹结构上的DLC薄膜具有最佳的性能,硬度约16 GPa,最高结合力极限载荷52 N,面-面接触、20 N载荷下磨损率1.35×10~(-6)mm~(-3)/N·m,耐磨性与无微结构DLC相比,最高可提高50倍。
Striped and square structures were fabricated on the GCr15 bearing steel substrate by using femtosecond laser, and the effects on the structure, bonding strength and wear resistance of diamond-like carbon (DLC) films were also studied. The chemical structure and morphology of the films were analyzed by Raman spectroscopy, scanning electron microscopy and white light interference profilometer. The scratch resistance and scratch resistance of the films were measured by scratch tester and SRV wear tester. The results show that the microstructure obtained under the conditions of power density of 0.96,400 mm / min and processing distance of 150-350 μm can enhance the sp3 bond content of DLC films and affect the bonding strength and wear resistance of DLC films. The DLC film with stripe structure with 250μm pitch has the best performance with a hardness of about 16 GPa, the maximum binding capacity of 52 N and the surface-to-surface contact loss of 1.35 × 10-6 mm at 20 N -3) / N · m, the abrasion resistance can be up to 50 times higher than the non-microstructure DLC.