论文部分内容阅读
利用Nd:YAG纳秒激光(波长分别为355、532和1064nm)辐照由电子束蒸发技术制备的类金刚石(DLC)薄膜,通过光学显微镜、光学轮廓仪和拉曼光谱仪等分析了辐照后的薄膜样品,结果表明:不同波长的单脉冲激光辐照时,DLC膜的激光损伤阈值不同;同一波长的多脉冲激光辐照时,损伤阈值低于单脉冲辐照阈值;脉冲激光辐照对DLC膜具有改性作用,受辐照薄膜区域表层发生了石墨化、剥落和气化效应,致使DLC膜表面出现了隆起和弹坑,隆起高度和弹坑深度与激光能量密度大小和脉冲个数有关。
Diamond-like carbon (DLC) films prepared by electron beam evaporation were irradiated by Nd: YAG nanosecond laser (wavelength of 355,532 and 1064nm respectively). The optical properties of the films were analyzed by optical microscope, optical profilometer and Raman spectroscopy The results show that the laser damage thresholds of DLC films are different when single-wavelength laser irradiation with different wavelengths is applied, while the damage threshold is lower than single-pulse irradiation threshold when multi-pulse laser irradiation with the same wavelength is applied. DLC film has the effect of modification. The graphitization, exfoliation and gasification effect occurred in the surface of the irradiated film, resulting in the appearance of bulge and crater on the surface of DLC film. The height of bulge and crater depth are related to the laser energy density and pulse number.