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本文介绍磁悬浮高速转子真空计(简称磁悬规),详细叙述了该计的工作原理。磁悬规是通过测量气体分子对高速转子的阻尼造成的转速衰减来测量气体压强。测出两个相邻的时间间隔τ_n,τ_(n+1)(在每个时间间隔上转子转动次数相同),利用P=c_o/σ(τ_(n+1)-τ_n)/τ_(n+1)·τ_n公式,计算出气体压强,其中c_o、σ为仅与转子和气体种类有关的常数。该计具有良好的测量重复性,在1Pa～10~(-4)Pa的压强范围中,三年内测量重复性零散小于1％。测量时不改变被测气体的成份与压强。它是一种有发展前途的真空计。
This article describes the maglev high-speed rotor vacuum gauge (referred to as magnetic suspension gauge), described in detail the working principle of the meter. Magnetic cantilevers measure gas pressure by measuring the decay of the rotational speed due to the damping of gas molecules to a high-speed rotor. Two adjacent time intervals τ_n, τ_ (n + 1) are detected (the number of rotations of the rotor is the same in each time interval), P = c_o / σ (τ_ (n + 1) -τ_n) / τ_ (n +1) · τ_n formula to calculate the gas pressure, where c_o, σ is only a rotor and gas species-related constants. The meter has good measurement repeatability, repeatability of less than 1% within three years in the pressure range of 1Pa ~ 10 ~ (-4) Pa. Measurement does not change the composition and pressure of the gas under test. It is a promising vacuum gauge.