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计算并讨论了由电极 -压电薄膜 -电极的三明治结构组成的体声波谐振器在有衬底情况下的阻抗 ,特别说明了厚的支撑膜对滤波器性能的严重影响。同时比较了在制作体声波滤波器时硅的体加工工艺和表面加工工艺的优劣 ,给出了利用硅的表面加工工艺制作的射频体声波滤波器的设计
The impedance of bulk acoustic wave resonator consisting of the sandwich structure of electrode-piezoelectric thin film-electrode with substrate is calculated and discussed. The influence of thick support film on filter performance is especially illustrated. At the same time, the advantages and disadvantages of the body processing technology and the surface processing technology of the bulk silicon acoustic wave filter are compared. The design of the radio frequency bulk acoustic wave filter made by using the surface processing technology of silicon is given