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利用金属有机物分解法(MOD),在Pt/Ti/SiO_2层的Si(100)衬底上制备了Bi_(3.15)Nd_(0.85)Ti_3O_(12)(BNd T)薄膜,并将其分别在氧气氛围和空气中进行快速退火处理。运用X射线衍射仪和场发射扫描电子显微镜对BNd T薄膜的晶体结构和形貌进行表征,通过在不同浓度气体氛围下监控材料电阻变化来研究其气敏性能。结果表明,在空气环境退火的BNd T薄膜具有多孔微结构和表面粗糙形貌,且退火氛围对BNdT薄膜气敏性能有较大的影响。在工作温度为100°C时,在空气中退火的BNdT薄膜对1×10~(-6)乙醇气体具有高的灵敏度,并且对乙醇气体的极限探测浓度达到0.1×10~(-6)。其响应和恢复时间分别约为6 s和10 s。研究结果为制作高性能乙醇传感器有指导的意义。
Bi 3.15 Nd 0.85 Ti 3 O 12 BNd T films were deposited on Pt / Ti / SiO 2 Si (100) substrates by metal organic decomposition (MOD) Atmosphere and air rapid annealing. The crystal structure and morphology of BNdT thin films were characterized by X-ray diffraction and field emission scanning electron microscopy. The gas sensitivities of BNdT thin films were investigated by monitoring the change of material resistance under different gas concentrations. The results show that BNdT films annealed in air have porous microstructure and rough surface morphology, and the annealing atmosphere has a greater influence on the gas sensing properties of BNdT films. The BNdT film annealed in air has high sensitivity to 1 × 10 -6 ethanol gas and the limit of detection of ethanol gas reaches 0.1 × 10 -6 at 100 ℃. The response and recovery times are about 6 s and 10 s, respectively. The research results have guiding significance for making high performance ethanol sensor.