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本文介绍一种低能远焦距电子枪的设计及其调试与鉴定的结果。该枪是为俄歇电子谱仪中斜射电子枪的需要而专门研制的。沿束轴方向焦点位置的改变是借助于正栅极G_2上的电位V_G_2的调节来实现的。在加速电压为3KV,灯丝发射电流小于1毫安和真空度P=4×10~(-5)托的条件下,距离枪口70毫米处,可达到的束斑直径d_(eff)(是按总束流I的80％来定义的)和束流H分别为;d_(eff)=0.4毫米,I=3微安;d_(eff)=0;5毫米,I=50微安,d_(eff)=0.6毫米,I=100微安。在俄歇电子谱仪的长期使用中证明:这种型式的电子枪,工作稳定可靠,使用与维修都很方便,适合实验室中各种条件下的应用。
This article describes the design of a low energy far focus electron gun and its commissioning and qualification results. The gun was developed specifically for the needs of oblique electron guns in Auger electron spectrometers. The change of the focus position in the beam axis direction is achieved by means of the adjustment of the potential V_G_2 on the positive gate G_2. At an accelerating voltage of 3 kV and a filament firing current of less than 1 mA and a vacuum degree of P = 4 × 10 -5 Torr, the achievable beam spot diameter, d eff, is Defined as 80% of the total beam I) and beam H are respectively: d eff = 0.4 mm, I = 3 μA, d eff = 0, 5 mm, I = 50 μA, d_ eff) = 0.6 mm, I = 100 μA. In the long-term use of Auger electron spectrometer proved: this type of electron gun, stable and reliable, easy to use and repair, suitable for laboratory applications under various conditions.