按照与 Lambda Photometrics 公司的共同开发计划,第一个产生标线片的激光驱动的微电子线路图形发生器在英国费兰提公司试验成功。脉冲紫外激光器取代普通的光源用于光致抗蚀剂的曝光。该图形发生器能以三倍于目前系统的速 Following the joint development plan with Lambda Photometrics, the first reticle-driven, laser-driven microelectronic circuit pattern generator was successfully tested in Feilanti, England. Pulsed UV lasers replace ordinary light sources for photoresist exposure. The graph generator can triple the current system speed