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陀螺管芯是微机电(MEMS)陀螺的核心器件,利用多频激励方法可以提高陀螺管芯的动态特性测试效率。该文基于静电激励-电容检测的原理进行线振动MEMS陀螺的动态特性测试,构造了线性初始相位差分布的等幅多频激励信号解决合成信号最大值限制的问题。用多频激励方法,完成频率分辨率为1Hz、谐振频率3 000Hz附近601个频率点的单个模态测试只需1.5s。多频激励和正弦扫频激励对比测试表明:两种方法测得幅、相频特性曲线几乎完全相同;谐振频率、幅值和相位的测试重复性相近;但多频方法测试精度略低于扫频激励。多频方法完全可满足大批量管芯装配前的筛选和配对测试的迫切需求。
Gyro die is the core device of MEMS gyroscope. The multi-frequency excitation method can improve the test efficiency of the gyro die. In this paper, based on the principle of electrostatic excitation-capacitance detection, the dynamic characteristics of linear vibration MEMS gyroscope are tested, and the problem of the maximum limit of the composite signal is solved by constructing the equal amplitude and multi-frequency excitation signal with linear initial phase difference distribution. With multi-frequency excitation, a single modal test with frequency resolution of 1 Hz and 601 frequencies around 3 000 Hz is only 1.5 s. Multi-frequency excitation and sinusoidal sweep excitation comparison test showed that: the two methods measured amplitude and phase frequency characteristics of the curve is almost the same; resonant frequency, amplitude and phase of the test repeatability is similar to the multi-frequency method, the test accuracy slightly lower than the sweep Frequency incentive. Multi-frequency method is fully meet the urgent needs of screening and pairing test before high-volume die assembly.