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提出一个在小角范围内计算多层膜界面粗糙度的理论计算公式 ,通过不同样品的小角度衍射曲线进行计算 ,结果表明由该公式根据不同周期、不同级次衍射峰计算的粗糙度相差比较小 ,而在相同条件下用已报道公式给出结果相差比较大。该理论公式获得的计算结果与实际观测结果比较一致。
A theoretical formula for calculating the interfacial roughness of multilayered films in a small angle range is proposed. The calculated results of the small-angle diffraction curves of different samples show that the difference of the roughness calculated by the formula according to different periods and different orders of diffraction peaks is relatively small , While under the same conditions with the reported formula gives the result a big difference. The calculation results obtained by the theoretical formula are in good agreement with the actual observation results.