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为得到GaAs表面稳定的钝化层,以(NH4)2S为主要对象,首先研究不同溶剂对钝化效果的影响,得出溶液极性越小,钝化效果越好的结论;研制出一种新的钝化溶液:Se+(NH4)2S+叔丁醇。通过光致发光(PL)谱对比(NH4)2S+去离子水、(NH4)S2+异丙醇、(NH4)2S+叔丁醇、Se+(NH4)2S+叔丁醇等几种不同含硫溶液钝化GaAs(100)表面的发光特性。通过测试PL发光谱发现,Se+(NH4)2S+叔丁醇溶液处理的GaAs(100)表面发光强度最强,是未做钝化处理的25倍左右。钝化处理后的基片在空气中放置数小时,PL谱未见明显退化。得出Se+(NH4)2S+叔丁醇不论从发光强度还是稳定性来说,都是较为理想的钝化溶液。
In order to get the stable passivation layer of GaAs, the (NH4) 2S is the main object. Firstly, the influence of different solvents on the passivation effect was studied. The conclusion was drawn that the smaller the solution polarity, the better the passivation effect. New passivation solution: Se + (NH4) 2S + t-butanol. The passivation of several different sulfur-containing solutions such as (NH4) 2S + isopropanol, (NH4) 2S + tert-butanol and Se + (NH4) 2S + Luminescence Properties of GaAs (100) Surfaces. By testing the PL spectra, it is found that the luminescent intensity of GaAs (100) treated by Se + (NH4) 2S + t-butanol solution is the strongest, which is about 25 times higher than that of the passivation treatment. After passivation treatment of the substrate in the air for several hours, no significant degradation of PL spectra. It is concluded that Se + (NH4) 2S + tert-butanol is an ideal passivation solution in terms of luminescence intensity and stability.