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目的评价某芯片制造厂薄膜区尾气燃烧管(burn tube)预防保养期间氟化氢浓度扩散对于空间与时间的关系,借此量化的距离与浓度变化关系来建立有效的管制禁区,避免无适当防护的洁净车间内工作人员进入此管制禁区,以降低现场工作人员的职业病有害因素的暴露风险。方法利用ChemKey TLD试纸带式气体侦测器来监测以被保养的尾气燃烧管为中心,距离对于氟化氢的浓度变化。结果该芯片制造厂薄膜区尾气燃烧管预防保养期间氟化氢浓度最高为9.0 mg/m~3,是《工作场所有害因素职业接触限值》(GBZ 2-2002)最高容许暴露浓度(2.0 mg/m~3)的4.5倍,是美国政府工业卫生专家协会(ACGIH)的氟化氢TLV-Ceiling(Threshold limit value-Ceiling;阈限值)值(2.6 mg/m~3)的3.5倍,随着以尾气燃烧管为中心的距离增大,氟化氢浓度逐渐递减。结论尾气燃烧管预防保养期间应至少划定距离尾气燃烧管开口处3m内的圆形区域为暴露管制禁区,现场执行预防保养人员应穿戴指定防护系数(APF)大于10甚至更高的呼吸防护面具、防酸手套及防护衣等个人防护用具,以有效地降低洁净车间内工作人员的氟化氢暴露风险。
Objective To evaluate the relationship between space and time for the proliferation of hydrogen fluoride during the burnup prevention and care of a burn tube in a thin film manufacturing area of a chip manufacturing facility and to establish an effective control area to avoid cleanliness without appropriate protection Workshop staff to enter the restricted area to reduce the occupational hazards of site staff exposed the risk factors. Method The ChemKey TLD strip tape gas detector was used to monitor the change in concentration for hydrogen fluoride centered on the tail gas burner being maintained. Results The maximum concentration of hydrogen fluoride during the preventive maintenance of the tail gas burner tube in the film factory was 9.0 mg / m 3, which was the maximum allowable exposure concentration (GBZ 2-2002) of 2.0 mg / m ~ 3), which is 3.5 times that of TLG-Ceiling (2.6 mg / m ~ 3) of the hydrogen fluoride TLV-Ceiling (2.6 mg / m ~ 3) of the ACGIH. Burning tube as the center of the distance increases, hydrogen fluoride concentration gradually decreased. Conclusion During the preventive maintenance of the tail gas burner tube, the circular area within 3m from the opening of the tail gas burner tube should be delineated as the restricted area for exposure control. The personnel performing on-site preventive maintenance should wear respiratory protection masks with the specified protection factor (APF) greater than 10 or even higher , Acid-proof gloves and protective clothing and other personal protective equipment to effectively reduce the risk of fluoride hydrogen fluoride workers in the clean room.