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运用复阻抗谱方法,在不同浓度乙醇与汽油气体中,测试SnO2厚膜气敏元件的电抗-频率关系曲线,由电抗的变化来标定元件的灵敏度.与以往的测试采用直流电参量标定灵敏度相比,复阻抗测试不仅提高了元件的灵敏度,而且显著改善了选择性.该结果表明复阻抗测试不仅反映元件在气体吸附或解吸时晶粒间界处晶界电阻的变化,也反映了晶界电容的变化,因而更能体现气敏机制的本质.
The complex impedance spectroscopy method was used to test the reactance-frequency curve of SnO2 thick film gas sensors in different concentrations of ethanol and gasoline. The sensitivity of the sensor was calibrated by the change of reactance. Compared with the previous test using DC parameter calibration sensitivity, complex impedance test not only improves the sensitivity of the components, but also significantly improves the selectivity. The results show that the complex impedance test not only reflects the change of grain boundary resistance at grain boundaries during gas adsorption or desorption, but also reflects the change of grain boundary capacitance, which can better reflect the essence of gas sensing mechanism.