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振镜式光束偏转／扫描技术已成为一种具有广泛应用潜力的激光束调制手段，它具有调制速度快（高达8kHz），精度高（可达0．06μrad）及易于控制等特点。本文着重介绍了利用振镜实现激光束二维扫描的实验研究，探讨利用这一系统完成激光扫描成像的光路；并探讨了利用激光点扫描成像实现监测／检测物体表面的初步研究结果。
Galvanometer beam deflection / scanning technology has become a widely used laser beam modulation method with the advantages of fast modulation (up to 8kHz), high precision (up to 0.06μrad) and easy control. This paper focuses on the experimental study of two-dimensional scanning of laser beam using galvanometer, discusses the optical path of laser scanning imaging using this system, and also discusses the preliminary research results of using laser point scanning imaging to monitor / detect the surface of laser.