一、简介光刻工艺在半导体器件和集成电路的制造中占有重要的地位。目前,半导体器件和集成电路取得这样迅速的发展,是和光刻工艺的广泛应用和光刻技术的不断改进分不开的。 I. Introduction Lithography process in the manufacture of semiconductor devices and integrated circuits occupy an important position. At present, the rapid development of semiconductor devices and integrated circuits is inseparable from the widespread application of photolithography and the continuous improvement of photolithography.