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在十八平方毫米的硅片上集成了二万七千个元件的高集成度大规模集成电路,称作4K位CMOS静态存贮器,可随意存入和取出4096种信息。该电路纵向有十几层结构,每层厚度小于1微米,整个电路中4微米左右的小孔有4万个以上,工艺要求十分复杂,长期依赖进口,一套版子需数十万美元。研制这种高性能电路,要求具有先进的装备和相当高的技术。上海冶金所经过两年的努力,终于研制成了该种先进电路,并通过了科学院院级技术鉴定。经鉴定,其性能指标已达
The integration of 27,000 high-integration LSIs on eighteen square mm silicon, called 4K-bit CMOS static memory, allows for the storage and retrieval of 4096 types of information. Longitudinal of the circuit has dozens of layers of structure, the thickness of each layer is less than 1 micron, the entire circuit of 4 microns or more holes have more than 40,000, the process requirements are very complex, long-term dependence on imports, a set of plates need tens of thousands of dollars. The development of such high-performance circuits requires advanced equipment and relatively high technology. Shanghai Metallurgical After two years of hard work, finally developed into the kind of advanced circuits, and adopted the Academy of Sciences-level technical appraisal. Identified, its performance indicators have been reached