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仿真和实验研究了含槽型(slot)光波导的反馈波导型微环谐振器的特性,将槽型光波导集成到Si基微环谐振器中,丰富Si基光波导的功能,为新型光电子器件的实现提供途径。通过锥形波导结构实现从传统波导到槽型波导的模式转换,减小传输损耗,采用时域有限差分法(FDTD)研究了光功率的分布和模式转换过程。结果显示,光功率逐渐转移到锥形结构两侧的槽型波导中并最终形成槽型波导中的传输模式,通过优化锥形结构能实现较高的模式转换效率,可以达到90%以上。采用电子束刻写技术和等离子刻蚀技术制备了反馈波导型槽型微环谐振器。实验显示,锥形波导能够实现模式的转换,光传输过程良好。通过在槽型波导中填充电光聚合物来改变槽型光波导的折射率,测量结果显示,传输谱谐振峰发生了明显移动,移动幅度达到5.6nm,器件具备很好的可调谐性。
The characteristics of the feedback waveguide type micro-ring resonator with the slot optical waveguide are simulated and experimentally studied. The slot optical waveguide is integrated into the Si-based micro-ring resonator to enrich the function of the Si-based optical waveguide, The realization of the device provides a way. Through the tapered waveguide structure, the mode conversion from the traditional waveguide to the slotted waveguide is realized and the transmission loss is reduced. The distribution and mode conversion of the optical power are studied by using the finite-difference time-domain (FDTD) method. The results show that the optical power is gradually transferred to the grooved waveguides on both sides of the tapered structure and the transmission mode in the grooved waveguide is finally formed. By optimizing the tapered structure, the high mode conversion efficiency can be achieved, which can reach more than 90%. The feedback waveguide slot micro-ring resonator was fabricated by electron beam lithography and plasma etching. Experiments show that the tapered waveguide mode conversion, light transmission process is good. The refractive index of grooved waveguide was changed by filling the grooved waveguide with electro-optic polymer. The measurement results showed that the resonant peak of the transmission spectrum shifted obviously with a moving amplitude of 5.6nm and the device possessed good tunability.