小型蒸发式玻璃钛泵(以下简称小钛泵)是一种最简单的、极限真空度比较高的、而又无油蒸汽污染的真空泵。它适合于作为某些电真空器件的辅助抽气手段,或者用于完成某些小型电真空器件的部分排气过程。几年来,我们在研制生产信标磁控管、电压调谐磁控管等工作中,利用小钛泵的这些优点,作为在这些管子排气过程中的一种抽气手段,收到了较大的 Small evaporative glass Titanium pump (hereinafter referred to as titanium pump) is one of the most simple, the ultimate vacuum degree is relatively high, but no oil vapor pollution of the vacuum pump. It is suitable for use as an auxiliary air extraction device for some vacuum devices, or for partial exhaust of some small vacuum devices. In recent years, we developed and manufactured beacon magnetrons, voltage-controlled magnetrons and other work, the use of these advantages of small titanium pump, as a pumping in the exhaust pipe of these means, received a larger