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本文研究了用于表征微悬臂梁动态特性的高真空系统,研究了用于夹持微悬臂器件的样品台和用于调节真空室内压力的精密可调漏气阀。该阀在不同压力区间下采取机械机构和压电陶瓷驱动器改变阀门开度,具有精度高、适用范围广等优点,利于实验研究和工程测试。模拟分析结果表明该阀能精确调节10-6Pa~103Pa内压力。系统设置了减振支架和底座,用波纹管连接真空室和抽气系统,对系统振动信号的模拟计算表明所用减振支架和底座能够减小杂质振动信号对微悬臂梁动态特性测定的干扰。采用一般商用漏气阀控压,对微悬臂梁品质因数的测定实验结果表明了表征系统及精密阀的实用前景。
In this paper, the high vacuum system used to characterize the dynamic characteristics of micro-cantilever was studied. The sample stage for clamping the micro-cantilever and the precision adjustable leak valve for regulating the pressure in the vacuum chamber were studied. The valve under different pressure range to take mechanical mechanism and piezoelectric ceramic actuator to change the valve opening, with high precision, wide range of applications, which will benefit the experimental research and engineering testing. Simulation results show that the valve can accurately adjust the pressure within 10-6Pa ~ 103Pa. The vibration damping bracket and the base are set in the system. The bellows is used to connect the vacuum chamber with the exhaust system. The simulation results of the system vibration signal show that the vibration damping bracket and the base can reduce the interference of the impurity vibration signal to the determination of the dynamic characteristics of the micro-cantilever. The common commercial leak valve control pressure, the micro-cantilever quality factor test results show that the characterization system and precision valve practical prospects.