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回音壁模式(Whispering Gallery Mode,WGM)的光学谐振腔作为光学研究的重要工具具有广泛的应用前景。以超纯单晶氟化钙为材料加工了直径为5 mm,厚度为1 mm的Ca F2盘型腔,并用化学机械抛光法对其进行了光学抛光,得到了粗糙度为纳米级别的CaF2盘型腔。搭建盘腔与锥形光纤的耦合测试平台测试所加工盘型腔的光学性能,测得在波长为1 550 nm时所加工的盘型腔的品质因数为2.1×106。对CaF2盘型腔损耗机制进行了理论分析,提出了提高CaF2盘型腔品质因数的方法。
Optical resonator in Whispering Gallery Mode (WGM) has a wide range of applications as an important tool in optical research. The CaF2 disk cavity with a diameter of 5 mm and a thickness of 1 mm was fabricated by using ultrapure single crystal calcium fluoride as a material and was optically polished by a chemical mechanical polishing method to obtain a CaF2 disk with a roughness of nanometer Cavity. The optical performance of the machined disc cavity was tested by coupling test platform with disc and tapered optical fiber. The quality factor of disc cavity machined at wavelength of 1 550 nm was 2.1 × 106. The mechanism of CaF2 disc cavity loss is theoretically analyzed and a method to improve the quality factor of CaF2 disc cavity is put forward.