论文部分内容阅读
准分子器件重复频率高于千赫兹时,闸流管作为传统的放电开关由于寿命瓶颈而不能满足长期稳定工作的要求。采用固体开关结合磁脉冲压缩技术的固态脉冲功率模块(SSPPM)来替代闸流管进行高压快速放电,激光器可在高重复频率下长寿命运行。设计了无闸流管的固体开关小能量准分子激光器,其核心技术是基于SSPPM的应用,并采用金属-陶瓷结构腔体和电晕预电离以延长气体工作寿命。电极放电电压10～14 kV,电压上升时间约150 ns,抽运功率密度3.9～7.6 MW/cm~3。ArF运转时,获得最大单脉冲能量11 mJ激光输出,最高重复频率300 Hz。其输出指标可满足当前准分子眼科设备、光谱学研究等需要。
When the repetition frequency of the excimer device is higher than kilohertz, the thyristor can not meet the requirements of long-term stable operation as a traditional discharge switch because of its life bottleneck. The solid state pulse power module (SSPPM) with solid-state switching combined with magnetic pulse compression technology can be used instead of a thyristor for rapid high-voltage discharge. The laser can operate at high repetition rates for long life. A solid-switching small-energy excimer laser with no thyristor is designed. Its core technology is based on the application of SSPPM. The metal-ceramic cavity and the corona are pre-ionized to prolong the working life of the gas. The electrode discharge voltage is 10 ~ 14 kV, the voltage rise time is about 150 ns, and the pumping power density is 3.9 ~ 7.6 MW / cm ~ 3. ArF operation, get the maximum single-pulse energy of 11 mJ laser output, the maximum repetition rate of 300 Hz. The output indicators to meet the current excimer ophthalmic equipment, spectroscopy and other needs.