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探讨了利用普通光谱型椭偏仪对各向异性液晶层进行综合性测量的可行性.并利用法国Jobin Yvon公司的UVISELSPME(Spectroscopic Phase Modulated Ellipsometer)光谱型椭偏仪测量了光学各向异性液晶层的折射率no和ne及液晶层厚d,进一步利用椭偏仪在透射方式下测量了平行排列液晶层的光延迟特性Δnd,二者取得了很好的一致性,说明利用光谱型椭偏仪可以实现对光学单轴性液晶层及其他材料的测量,测厚精度为纳米量级.
The feasibility of using a general spectroscopic ellipsometer to measure the anisotropic liquid crystal layer was discussed.The optical anisotropic liquid crystal layer was measured by the Spectroscopic Phase Modulated Ellipsometer (UVISELSPME) spectroscopic ellipsometer from Jobin Yvon, France Of the refractive index no and ne and the thickness d of the liquid crystal layer, the optical retardation characteristics Δnd of the parallel aligned liquid crystal layers were further measured by ellipsometry in a transmission mode, and the two obtained good agreement, indicating that the spectral ellipsometry Can be achieved on the optical uniaxial liquid crystal layer and other materials measurement, thickness accuracy of nano-scale.