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采用固定Ti间隔层厚度,改变Ti N层厚度的方法在Ti6Al4V合金表面制备Ti/Ti N多层膜,研究循环周期对Ti/Ti N多层膜的相结构、形貌特征、结合力、硬度和在模拟人体液中摩擦磨损行为的影响.结果表明,与Ti N单层膜相比,Ti/Ti N多层膜中Ti N由(111)择优取向转变为(200)择优取向,多层膜表面粗糙度、硬度和结合力得到显著改善.增加循环周期降低Ti/Ti N多层膜表面硬度,但有利于提高结合强度.多层Ti/Ti N膜的强韧化主要来自于Ti N层的细晶强化和界面共格强化效应.当Ti N与Ti层厚度比为30,循环周期为3时,Ti/Ti N多层膜具有良好的综合性能,硬度为15.8 GPa,结合强度为50 N,摩擦系数为0.35,体积磨损率低于4.0×10-6mm3/(N·m).
Ti / TiN multilayer films were prepared on the surface of Ti6Al4V alloy by changing the thickness of Ti interlayer and changing the thickness of Ti interlayer. The effects of cycle on the phase structure, morphology, adhesion, hardness And the friction and wear behavior in simulated human body fluid.The results show that the TiN in Ti / TiN multilayers changes from (111) to (200) The surface roughness, hardness and bonding strength of the Ti / TiN multilayer films were significantly improved.It was found that the increase of the cycle time can reduce the surface hardness of the Ti / TiN multilayer films, but it is beneficial to improve the bonding strength.The strengthening and toughening of the multilayer Ti / Fine grain strengthening and interfacial coherence strengthening effect of Ti / TiN multilayers with a TiN / Ti ratio of 30 and a cyclic period of 3, the hardness is 15.8 GPa and the bonding strength is 50 N, a friction coefficient of 0.35 and a volumetric wear rate of less than 4.0 × 10 -6 mm 3 / (N · m).