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集成电路制造技术集成套工艺是当今全球装备制造业中最尖端的技术之一,是信息技术硬件的核心。在国务院颁布的《国家中长期科学和技术发展规划纲要》中,“极大规模集成电路制造装备与成套工艺”已经被列为重大专项。集成电路制造前道工序的关键工艺设备,工艺水平直接影响到最终芯片产品的质量及生产技术的先进性,是各国关注和竞争
Integrated circuit manufacturing technology Integrated sleeve technology is one of the most advanced technologies in today’s global equipment manufacturing industry and is the core of information technology hardware. In the “Outline of National Medium and Long-term Scientific and Technological Development Plan” promulgated by the State Council, “VLSI manufacturing equipment and complete set technology” has been listed as a major project. IC manufacturing process before the key process equipment, the level of technology directly affect the final chip product quality and advanced production technology is the concern and competition in various countries