论文部分内容阅读
本实用新型公开了一种基于激光束感应电流的微激光束扫描谱装置,该装置包括氦氖激光器、声光调制器、光束扩束器、光束分束器、CCD摄像机、会聚显微物镜、置于带有两个步进马达的三维样品调整架上的样品、放大器、计算机。激光束经扩束和会聚后入射到样品上,样品产生的感应电流信号经放大器放大。整个测试过程均由计算机控制,包括数据采集、存储及处理等。本装经结构简单、测量方便、对样品没有破坏,可用于大面积光伏型器件工艺过程的在线检测,还可以用于半导体材料电活性缺陷的测量。
The utility model discloses a micro-laser beam scanning spectrum device based on laser beam induced current, which comprises a helium-neon laser, an acousto-optic modulator, a beam expander, a beam splitter, a CCD camera, a convergent microscope objective, Samples, amplifiers, computers placed in a three-dimensional sample holder with two stepper motors. The laser beam is incident on the sample after being expanded and converged, and the induced current signal generated by the sample is amplified by the amplifier. The entire testing process is controlled by the computer, including data acquisition, storage and processing. This device has the advantages of simple structure, convenient measurement and no damage to the sample. It can be used for on-line detection of large-scale photovoltaic device process, and can also be used for the measurement of electroactive defects of semiconductor materials.