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本文综述光纤制造工艺中的PCVD法的原理、发展过程和现状。其中主要叙述荷兰Philips公司发展的微波低压PCVD法。并对其前景作出肯定的评价。对其它的等离子体工艺也作一简介。
This paper reviews the principle, development and current situation of PCVD in optical fiber manufacturing process. Which mainly describes the development of the Netherlands Philips microwave low voltage PCVD method. And make a positive assessment of its prospects. A brief introduction to other plasma processes.