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等离子体技术的发展,迄今为止,大约已经提出了三种等离子体光谱光源。一是双电极直流等离子体喷焰,二是微波等离子体,三是电感耦合高频等离子体(简称 ICP)。其中以 ICP 作为光谱光源较其他两种等离子体具有更多的优点,应用最为广泛,本文仅就 ICP 光源作论述。一、ICP 光源的发展概况早在1942年 Babat 发表了他用高频磁场激发的涡流无极放电形成等离子体条件的研究成果。实用的 ICP 装置是 Reed 在
To date, there have been about three types of plasma spectral light sources that have been proposed for the development of plasma technology. First, the two-electrode DC plasma flame, the second is a microwave plasma, the third is inductively coupled high-frequency plasma (referred to as ICP). Among them, ICP as the spectral light source has more advantages than the other two kinds of plasma and is the most widely used. This article only discusses the ICP light source. First, the development of ICP light source As early as 1942, Babat published his high-frequency magnetic field induced eddy current discharge of plasma to form the research results. Practical ICP device is Reed at