采用含氢聚硅氧烷(HPSO)和二乙烯基苯(DVB)的交联体掺入聚二甲基硅氧烷(PDMS)中,使改性的聚二甲基硅氧烷(M-PDMS)折射率发生1%～1.8%的改变。M-PDMS及PDMS薄膜具有良好的光透射率和低的传输损耗,是低成本制备用于高速芯片间光互连聚合物光波导的理想材料。采用软成型和图案转移法,用M-PDMS及PDMS分别作波导的芯层和包层制备了截面为50μm×50μm,长度大于20cm的聚硅氧烷多模光波导。用数字化散射法测量了所制备波导的传输损耗,测得输入光波长为633nm时平均传输损耗为0.137dB/cm。 The cross-linked product of hydrogen polysiloxane (HPSO) and divinylbenzene (DVB) was incorporated into polydimethylsiloxane (PDMS) so that the modified polydimethylsiloxane (M- PDMS) refractive index changes 1% ~ 1.8%. M-PDMS and PDMS films have good light transmittance and low transmission loss, making them ideal for low cost fabrication of optical waveguides for high speed inter-chip optical interconnects. Using M-PDMS and PDMS as the core and cladding of the waveguide respectively, a polysiloxane multimode optical waveguide with a cross section of 50μm × 50μm and a length of more than 20cm was prepared by soft forming and pattern transfer. The transmission loss of the prepared waveguide was measured by the digital scattering method. The average transmission loss was 0.137dB / cm when the input light wavelength was 633nm.