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近３０年来，人们在利用光学方法测量润滑膜的厚度方面进行了许多研究，并且提出了一些膜厚测量方法。但是，这些方法在测量纳米级润滑薄膜时却都不同程度地存在着分辨率和精度都低等缺点。因此，根据光干涉法测量膜厚的基本原理提出了相对光强原理，并且经过特定的光路设计，研制了一种ＮＧＹ－２型纳米级润滑膜厚度测量仪．在给定条件下的测试结果表明，这种测量仪具有膜厚测量分辨率和精度都高，以及抗外界光场变化能力强等优点．关键词
In the past 30 years, many studies have been made on the optical method for measuring the thickness of lubricating films, and some methods for measuring film thickness have been proposed. However, these methods have some shortcomings such as low resolution and low precision when measuring nanoscale lubricating films. Therefore, based on the principle of optical interference method to measure the thickness of the film, the principle of relative intensity of light is proposed, and a NGY-2 nano-scale lubricant film thickness measuring instrument has been developed through a specific optical path design. The test results under the given conditions show that the measuring instrument has the advantages of high resolution and precision of film thickness measurement and strong ability of resisting external light field changes. Key words