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比较了活动掩膜法与固定掩膜法得到的PMMA胶结构 ,实验表明固定掩膜法更适合于多次曝光。结合LIGA技术和微细电火花加工的优点 ,用LIGA技术制备出具有复杂形状的铜微细工具电极 ,再用该工具电极进行微细电火花加工 ,在不锈钢上加工出异形微细孔。并通过进一步调整电火花加工工艺参数 ,优化了加工尺寸精度和表面粗糙度。
Compared with the active mask method and the fixed mask method, the PMMA glue structure is obtained. Experiments show that the fixed mask method is more suitable for multiple exposure. Combined with the advantages of LIGA technology and micro-EDM, a copper micro-tool electrode with complex shape was prepared by using LIGA technology. The micro-EDM was performed by the electrode of the tool, and the special micro-hole was formed on the stainless steel. And by further adjusting the EDM process parameters, the optimization of the processing of dimensional accuracy and surface roughness.